Nano Technology

 

SEMESTER-7 Course: BE ECE SUBJECT: Nano Technology COURSE OBJECTIVE: To introduce and provide a broad view of the nascent field of nanotechnology to Undergraduates. To introduce students to inter- and multi-disciplinary science and engineering. Syllabus: Unit-1 Limitations of CMOS Fundamentals of MOSFET devices, Scaling of CMOS, Limitations, Alternative concepts in materials, Structures of MOS devices: SOI MOSFET, FINFETS, Dual Gate MOSFET, Ferroelectric FETs. Unit-II Micro and Nano Fabrication Optical Lithography, Electron beam Lithography, Atomic Lithography, Molecular beam epitaxy, Nano-lithography. Unit-III Characterization Equipments  Principles of Electron Microscopes, Scanning Electron Microscope, Transmission Electron Microscope, Atomic Force Microscope, Scanning Tunneling Microscope. Unit-IV Nano Devices-1 Resonant tunneling diodes, Single electron devices, Josephson junction, Single Flux Quantum logic, Molecular electronics Unit-V Nano Devices-11 Quantum computing principles,