Nano Technology

Optical lithography Definition: Optical Lithography Optical lithography, also known as photolithography, is a key process used in semiconductor manufacturing to transfer intricate patterns onto a silicon wafer. It is a technique that utilizes light to project a pattern onto a photosensitive material, known as a photoresist, which is coated on the wafer surface. History  The earliest optical lithography tools used in the manufacturing of semiconductor devices were of a type classified at contact printers. In these systems, a mask is placed in direct contact with the photoresist-coated wafer and light is shined through the mask. Patterned areas on the mask served to block the light causing the negative of the pattern to be transferred to the wafer. The problem with the contact approach, however, was the rapid generation of defects on the mask, which are subsequently replicated in all exposures. The industry addressed this problem with the introduction of proximity lithography which i...

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Book/Notes:- Lecture Introduction to Microelectronic Fabrication:- Photolithography Introduction-to-Micro-Nanofabrication Microelectronics Fabrication VLSI Fabrication Principles silicon-and-gallium-arsenide-1994-ghandi-wiley Introduction-to-Microelectronic-fabrication-R-C-jaeger the_materials_science_of_thin_films.pdf Fundamentals of Microfabrication Fundamental Principles of Optical Lithography by Chris Mack Micro Nano Fabrication Fundamentals of Micro and Nanofabrication

ntroduction Ferroelectrics : dielectric crystals which show a spontaneous electric polarization and the direction of polarization can be reoriented by an external electric field I n ferroelectric memories,  the  direction of  spontaneous polarization is used to store digital bits.  Non-volatile electrically switchable data storage devices can be implemented.  Typically implemented as a capacitor consisting of a thin ferroelectric film in between two conductive electrodes.  The voltage pulse applied to the cap determines the polarity (“0” or “1”).  For readout another voltage pulse is applied that determines whether or not polarization switched direction.  Read process is non-destructive.  Efforts focused on  the  development of ferroelectric FETs.  Data read out in FeFET in non-destructive.  FeFET has both memory and logic functions.  FeF...