Lithography

References

  • https://nanohub.org/resources/22227/watch?resid=24303
  • https://images.anandtech.com/doci/8223/special_img08.gif
  • https://micro.magnet.fsu.edu/primer/anatomy/numaperture.html
  • https://www.researchgate.net/figure/Relationship between the aperture diameter and depth of focus in SEM_fig1_259944185
  • https://nanohub.org/resources/24289/watch?resid=24507
  • https://www.slideshare.net/SantoshBhatt12/wet etching 81475268
  • https://link.springer.com/referenceworkentry/10.1007%2F978 90 481 9751 4_431
  • https://ocw.mit.edu/courses/electrical engineering and computer science/6 152j micro nano processing technology fall 2005/lecture notes/ lecture17.pdf
  • https://www.memsnet.org/mems/fabrication.html
  • https://www.sciencedirect.com/topics/materials science/dry etching
  • https://digitalcommons.unl.edu/cgi/viewcontent.cgi?article=1265&context=mechengfacpub
  • https://australiasurfacemetrologylab.org/principles of operation scanning probe microscopy
  • https://www.researchgate.net/figure/a Etched tungsten tip with initial wire diameter of 175 m m The wire was immersed in_fig1_37434824
  • https://www.azonano.com/article.aspx?ArticleID=1746
  • https://www.researchgate.net/figure/Describing the sequences for dry plasma etch system_fig1_330038721
  • https://www.mems exchange.org/MEMS/fabrication.html
  • https://www.intechopen.com/books/thin film processes artifacts on surface phenomena and technological facets/introductory chapter the pr ominence of thin film science in
  • technological scale
  • https://www.open.edu/openlearn/science maths technology/engineering technology/manupedia/physical vapour deposition pvd
  • https://www.researchgate.net/figure/a Schematic representation of the dip pen nanolithography DPN process A water_fig6_315327693
  • https://www.researchgate.net/figure/Process flow for the fabrication of polymer microstructures using microtransfer molding_fig9_3249088 55
Nanoimprint process vs. traditional optical lithography. Source: Canon
  • https://semiengineering.com/what happened to nanoimprint litho
  • https://www.semanticscholar.org/paper/Immersion lithography%3A Moving microlithography to Taylor Chambers/66b9ee843817bad6f071695e710970 fef8b8fa0a
  • https://www.semanticscholar.org/paper/Impact of sub wavelength electromagnetic in optical Azpiroz Rosenbluth/425c4551ff7726f3f52162e83ea df396d7f63012/figure/1
  • https://www.rit.edu/kgcoe/microsystems/lithography/research/immersion/SPIE2005_5754 12 b.pdf
  • https://www.electronicsweekly.com/news/first transistor created 70 years ago the device that changed the world 2017 12

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